MICROELECTRONICS

CLEAN AIR INNOVATION THAT HELPS CONTROL LEAKS & OFF-GASSING

Technology and control at the molecular level is critical to success. We design the clean air innovation needed to help you take more command over the production environment. Boron-free and chemically inert filter media limit off-gassing that can damage microelectronics. Long-lasting, high-efficiency HEPA filtration systems can help reduce energy use and labor costs. AAF offers the clean air solutions and insights needed to help keep the microelectronics industry moving forward.
Technology and control at the molecular level is critical to success. We design the clean air innovation needed to help you take more command over the production environment. Boron-free and chemically inert filter media limit off-gassing that can damage microelectronics. Long-lasting, high-efficiency HEPA filtration systems can help reduce energy use and labor costs. AAF offers the clean air solutions and insights needed to help keep the microelectronics industry moving forward.
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INDUSTRY-LEADING PRODUCTS

INDUSTRY-LEADING BENEFITS

REDUCES SPREAD OF AIRBORNE MOLECULAR CONTAMINANTS

REDUCES SPREAD OF AIRBORNE MOLECULAR CONTAMINANTS

Combining high-quality prefilters and HEPA filters is recommended to help control the spread of AMC in cleanrooms.

HELPS ELIMINATE OFF-GASSING CONCERNS

HELPS ELIMINATE OFF-GASSING CONCERNS

Look for boron-free filters to avoid off-gassing that can damage microelectronic circuit boards and lead to intermittent and hard failures.

RESISTS HANDLING DAMAGE

RESISTS HANDLING DAMAGE

Polymer-based filter media such as AAF’s eFRM and ePTFE offer more tensile strength and abrasion resistance than traditional glass filters.

ALLOWS SCANNING TO PROTECT AGAINST LEAKAGE

ALLOWS SCANNING TO PROTECT AGAINST LEAKAGE

Unlike V-bank HEPA filters, MEGAcel l filters can be scanned for potential leaks.

Helps eliminate off-gassing concerns

AAF’s alternatives to standard filter media offer advantages for the cleanroom environment. These advanced media are boron-free, so they won’t release boron gas that can cause a film on wafers. Filters like the MEGAcel l eFRM and MEGAcel ll ePTFE are also chemically inert and hydrophobic, helping make them resistant to water and chemicals in the airstream. Their durability can minimize damage during the handling and installation process.

Allows scanning to protect against leakage

Unlike V-bank HEPA filters, MEGAcel l filters can be scanned for potential leaks. They’re also more durable than traditional glass filters, so they can hold up to normal shipping, storage and installation. Their rugged design not only helps protect against leaks, but it can also help reduce the inventory needed for filter changeouts.

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